@article{oai:fit.repo.nii.ac.jp:00000782,
 author = {北山, 幹人},
 journal = {福岡工業大学総合研究機構研究所所報},
 month = {Oct},
 note = {application/pdf, The Silicon Nitride (Si₃N₄) has drawn much attention as electrical substate materials for power module. One of the factors that decrease the thermal conductivity of Si3N4 is phonon scattering caused by the lattice oxygen. Yttrium disilicide (YSi₂) is expected to act as an effective oxygen getter that would actively remove impurity oxygen contained in the raw materials and further added during processing. It was found that the addition of YSi₂ significantly inhibited the phase transformation and densification, which would suggest that YSi₂ effectively acted as an oxygen getter to decrease the SiO₂ content, and hence the amount of the liquid phase. Although the thermal conductivities of gas-pressure sintered Si₃N₄ were improved with increasing the amount of YSi₂, those of reaction-bonded Si₃N₄ were significantly deteriorated due to their much smaller grain size., 論文(Atticle)},
 pages = {11--13},
 title = {希土類ケイ化物を脱酸素焼結助剤として用いる高熱伝導窒化ケイ素の開発研究},
 volume = {5},
 year = {2022}
}